3M™ Betapure™ AUL Series Filter Capsules
3M™ Betapure™ AUL Series Filter Capsules
3M™ Betapure™ AUL Series Filter Capsules
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3M Products & Supplies

3M Betapure AUL Series Filter Capsule AUZ13020Y02RC, 2 in, .2 um, 6/Case

Sold As: 6-Pack
SKU: 7100206450
MPN: 70020350446
Stock Item: Stock items typically ship within 2-3 business days
UPC: 00638060344255
3M ID: 70020350446
$421.03 ($70.17 / Count)
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Product Description

3M Betapure AUL Series Filter Capsules contain 3M Betapure AUL filters that represent a new generation in Chemical Mechanical Planarization (CMP) slurry classification providing superior reduction of large particle counts for improved yields.

Specifications

Shelf Life1825 Days

Features

  • Bi-component fiber technology with targeted multizone filtration layers enables Large Particle Count (LPC) reduction
  • Classification filter designed for Chemical Mechanical Planarization (CMP) slurry classification
  • Rigid filter structure maintains pore size even under intermittent process conditions for consistent filtration

Data Sheets

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