3M™ Betapure™ AUL Series Filter Capsules
3M™ Betapure™ AUL Series Filter Capsules
3M™ Betapure™ AUL Series Filter Capsules
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3M Products & Supplies

3M Betapure AUL Series Filter Capsules AULZ13007Y04LC06, 5 in, 0.7 um ABS, EPR, 1/case 98241 Industrial 3M Products & Supplies

SKU: 7100060336
MPN: 70020324037
Stock Item: Stock items typically ship within 2-3 business days
UPC: 00054007982418
3M ID: 70020324037
5 Digit UPC: 98241
$140.37 each
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Product Description

3M Betapure AUL Series Filter Capsules contain 3M Betapure AUL filters that represent a new generation in Chemical Mechanical Planarization (CMP) slurry classification providing superior reduction of large particle counts for improved yields.

Specifications

Shelf Life1825 Days
Country of OriginUSA
Manufacturer3M

Features

  • Bi-component fiber technology with targeted multizone filtration layers enables Large Particle Count (LPC) reduction
  • Classification filter designed for Chemical Mechanical Planarization (CMP) slurry classification
  • Rigid filter structure maintains pore size even under intermittent process conditions for consistent filtration

Data Sheets

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