Betapure™ AU-L Filter
Betapure™ AU-L Filter
Betapure™ AU-L Filter
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3M Products & Supplies

3M Betapure AUL Series Filter Cartridge AUL20Z13FC007, 20 in, 0.7 um ABS, 222, EPR, 15/case 98235 Industrial 3M Products & Supplies

Sold As: 15-Pack
SKU: 7100057150
MPN: 70020323906
Stock Item: Stock items typically ship within 2-3 business days
UPC: 00054007982357
3M ID: 70020323906
5 Digit UPC: 98235
$2,236.36 ($149.09 / Count)
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Product Description

3M Betapure AUL Series Filter Cartridges represent a new generation in Chemical Mechanical Planarization (CMP) slurry classification providing superior reduction of large particle counts for improved yields. Featuring bi-component fiber technology with targeted multizone filtration layers to enable Large Particle Count (LPC) reduction and yield improvement in the most advanced CMP processes.

Specifications

Country of OriginUSA
Manufacturer3M
Size2.92 in2.92 in

Features

  • Bi-component fiber technology with targeted multizone filtration layers enable Large Particle Count (LPC) reduction
  • Classification filter designed for Chemical Mechanical Planarization (CMP) slurry classification
  • The rigid filter structure maintains pore size even under intermittent process conditions, providing consistent filtration

Data Sheets

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