3M Betapure AUL Series Filter Cartridge, AUL2Z15FCSF5, 5/CS
3M Betapure AUL Series Filter Cartridge, AUL2Z15FCSF5, 5/CS
3M Betapure AUL Series Filter Cartridge, AUL2Z15FCSF5, 5/CS
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3M Products & Supplies

3M Betapure AUL Series Filter Cartridge, AUL2Z15FCSF5, 5/CS

Sold As: 3-Pack
SKU: 7100212302
MPN: 70020351584
Stock Item: Stock items typically ship within 2-3 business days
UPC: 00638060354933
3M ID: 70020351584
$84.95 ($28.32 / Count)
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Product Description

3M Betapure AUL Series Filter Cartridges represent a new generation in Chemical Mechanical Planarization (CMP) slurry classification providing superior reduction of large particle counts for improved yields. Featuring bi-component fiber technology with targeted multizone filtration layers to enable Large Particle Count (LPC) reduction and yield improvement in the most advanced CMP processes.

Specifications

Shelf Life1825 Days

Features

  • Bi-component fiber technology with targeted multizone filtration layers enable Large Particle Count (LPC) reduction
  • Classification filter designed for Chemical Mechanical Planarization (CMP) slurry classification
  • The rigid filter structure maintains pore size even under intermittent process conditions, providing consistent filtration

Data Sheets

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