3M Betapure AUL Series Filter Cartridge, AUL2Z15FCSF5, 5/CS
3M Betapure AUL Series Filter Cartridge, AUL2Z15FCSF5, 5/CS
3M Betapure AUL Series Filter Cartridge, AUL2Z15FCSF5, 5/CS
Previous Next

3M Products & Supplies

3M Betapure AUL Series Filter Cartridge, AUL2Z15FCSF5, 5/CS

Sold As: 3-Pack
SKU: 7100212302
Made to Order: For a lead time estimate, please send your request to orders@strobelssupply.com
UPC: 00638060354933
3M ID: 70020351584
Shelf Life: 1825 Days
$75.97 ($25.32 / Count)
Hurry up! Current stock:
Product Description  
3M Betapure AUL Series Filter Cartridges represent a new generation in Chemical Mechanical Planarization (CMP) slurry classification providing superior reduction of large particle counts for improved yields. Featuring bi-component fiber technology with targeted multizone filtration layers to enable Large Particle Count (LPC) reduction and yield improvement in the most advanced CMP processes.

Extra Details

  • Bi-component fiber technology with targeted multizone filtration layers enable Large Particle Count (LPC) reduction
  • Classification filter designed for Chemical Mechanical Planarization (CMP) slurry classification
  • The rigid filter structure maintains pore size even under intermittent process conditions, providing consistent filtration

Data Sheet

  1. Tech Data Sheet

Customers Also Viewed